Testing Temperature Uniformity Across a Wafer Heater Surface

https://advanced-heat-elements.oakridgedigest.com/posts/how-a-glass-heater-helps-manage-fogging-and-condensation

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result