A Practical OEM Checklist for Specifying a Wafer Heater

https://precision-heater-hub.swiftnestly.com/posts/kapton-heater-applications-in-electronics-and-precision-equipment

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result